High coupling piezoelectric thin films of Pb„Zr,Ti...O3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators
نویسندگان
چکیده
We have deposited nearly stress-free single-crystal thin films of 001 Pb Mn,Nb O3–Pb Zr,Ti O3 PMnN-PZT on 001 MgO substrates by rf-magnetron sputtering using a quenching process after the film growth. It is found that single c-domain/single-crystal thin films of PMnN-PZT containing 5%–10% PMnN show a strong hard ferroelectric response with 2Ec 400 kV /cm and Ps 70 C /cm2. GHz-range film bulk acoustic resonators incorporating PMnN-PZT thin films have been fabricated with microelectromechanical system technology. The maximum electromechanical coupling coefficient kt and mechanical quality factor Qm were 0.7 and 185 in the 4 GHz range, respectively. © 2009 American Institute of Physics. DOI: 10.1063/1.3126060
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